@misc{indiciae7174cbaa4cc5, title = {Direct implicit and explicit energy-conserving particle-in-cell methods for modeling of capacitively coupled plasma devices}, author = {Sun, Haomin (ORCID:0000000174036450) and Banerjee, Soham (ORCID:0000000264003580) and Sharma, Sarveshwar (ORCID:0000000206420247) and Powis, Andrew Tasman (ORCID:0000000307558376) and Khrabrov, Alexander V. (ORCID:000000022791203X) and Sydorenko, Dmytro and Chen, Jian (ORCID:000000019807489X) and Kaganovich, Igor D. (ORCID:0000000306535682)}, year = {2023}, doi = {10.1063/5.0160853}, url = {https://www.osti.gov/biblio/2567930}, note = {Source identifier: 2567930} }