TY  - RPRT
TI  - Direct implicit and explicit energy-conserving particle-in-cell methods for modeling of capacitively coupled plasma devices
AU  - Sun, Haomin (ORCID:0000000174036450)
AU  - Banerjee, Soham (ORCID:0000000264003580)
AU  - Sharma, Sarveshwar (ORCID:0000000206420247)
AU  - Powis, Andrew Tasman (ORCID:0000000307558376)
AU  - Khrabrov, Alexander V. (ORCID:000000022791203X)
AU  - Sydorenko, Dmytro
AU  - Chen, Jian (ORCID:000000019807489X)
AU  - Kaganovich, Igor D. (ORCID:0000000306535682)
PY  - 2023
DO  - 10.1063/5.0160853
UR  - https://www.osti.gov/biblio/2567930
ID  - 2567930
ER  -