@misc{indiciae8bde0923288d,
  title = {Atomic Layer Deposition for Enhanced Light Confinement in Nonlinear Metasurfaces},
  author = {Babicheva, Viktoriia E. [Univ. of New Mexico, Albuquerque, NM (United States)] (ORCID:0000000207895738) and Chang, Chun-Chieh [Los Alamos National Laboratory (LANL), Los Alamos, NM (United States)] (ORCID:0000000337282454)},
  year = {2025},
  doi = {10.1021/acsomega.5c01391},
  url = {https://www.osti.gov/biblio/2570877},
  note = {Source identifier: 2570877}
}