TY  - RPRT
TI  - Atomic Layer Deposition for Enhanced Light Confinement in Nonlinear Metasurfaces
AU  - Babicheva, Viktoriia E. [Univ. of New Mexico, Albuquerque, NM (United States)] (ORCID:0000000207895738)
AU  - Chang, Chun-Chieh [Los Alamos National Laboratory (LANL), Los Alamos, NM (United States)] (ORCID:0000000337282454)
PY  - 2025
DO  - 10.1021/acsomega.5c01391
UR  - https://www.osti.gov/biblio/2570877
ID  - 2570877
ER  -