@misc{indiciae6b12c1580d30,
  title = {Zone plate-based extreme ultraviolet mask microscope with through-pellicle imaging capability},
  author = {Benk, Markus and Zaytsev, Dmytro and Orman, Chris and Vollmer, Brandon and Santos, Daniel and Gamsby, Jeffrey and Mentz, Jeremy and Salmassi, Farhad and Allezy, Arnaud and Rekawa, Senajith and Miyakawa, Ryan and Chao, Weilun and Gullikson, Eric and Chegwidden, Scott and Zhang, Guojing and Naulleau, Patrick and La Fontaine, Bruno},
  year = {2024},
  doi = {10.1117/1.jmm.23.4.041404},
  url = {https://www.osti.gov/biblio/2571661},
  note = {Source identifier: 2571661}
}