@misc{indiciaea7fd384b5b49,
  title = {Transformer coupled toroidal wave-heated remote plasma sources operating in Ar/NF 3 mixtures},
  author = {Doyle, Scott J. and Larson, Amanda and Rosenzweig, Guy and Gunn, James and Kushner, Mark J.},
  year = {2024},
  doi = {10.1088/1361-6463/ad660f},
  url = {https://www.osti.gov/biblio/2572022},
  note = {Source identifier: 2572022}
}