TY  - RPRT
TI  - Transformer coupled toroidal wave-heated remote plasma sources operating in Ar/NF 3 mixtures
AU  - Doyle, Scott J.
AU  - Larson, Amanda
AU  - Rosenzweig, Guy
AU  - Gunn, James
AU  - Kushner, Mark J.
PY  - 2024
DO  - 10.1088/1361-6463/ad660f
UR  - https://www.osti.gov/biblio/2572022
ID  - 2572022
ER  -