@misc{indiciae62cf494ca663,
  title = {Mask-side Hyper-NA EUV imaging on the SHARP microscope},
  author = {Benk, Markus and Miyakawa, Ryan and Chao, Weilun and La Fontaine, Bruno},
  year = {2025},
  doi = {10.1117/1.jmm.24.1.014401},
  url = {https://www.osti.gov/biblio/2573790},
  note = {Source identifier: 2573790}
}