TY  - RPRT
TI  - Mask-side Hyper-NA EUV imaging on the SHARP microscope
AU  - Benk, Markus
AU  - Miyakawa, Ryan
AU  - Chao, Weilun
AU  - La Fontaine, Bruno
PY  - 2025
DO  - 10.1117/1.jmm.24.1.014401
UR  - https://www.osti.gov/biblio/2573790
ID  - 2573790
ER  -