@misc{indiciaebb36e6fad636,
  title = {Modeling scale-up of particle coating by atomic layer deposition},
  author = {Yanguas-Gil, Angel [Argonne National Laboratory (ANL), Argonne, IL (United States)] (ORCID:0000000182073825) and Elam, Jeffrey W. [Argonne National Laboratory (ANL), Argonne, IL (United States)] (ORCID:0000000258612996)},
  year = {2024},
  doi = {10.1116/6.0004006},
  url = {https://www.osti.gov/biblio/2573941},
  note = {Source identifier: 2573941}
}