TY  - RPRT
TI  - Modeling scale-up of particle coating by atomic layer deposition
AU  - Yanguas-Gil, Angel [Argonne National Laboratory (ANL), Argonne, IL (United States)] (ORCID:0000000182073825)
AU  - Elam, Jeffrey W. [Argonne National Laboratory (ANL), Argonne, IL (United States)] (ORCID:0000000258612996)
PY  - 2024
DO  - 10.1116/6.0004006
UR  - https://www.osti.gov/biblio/2573941
ID  - 2573941
ER  -