@misc{indiciaee5f20bebe68a, title = {Ion-Assisted Nanoscale Material Engineering in Atomic Layers}, author = {Taghinejad, Hossein and Taghinejad, Mohammad and Abdollahramezani, Sajjad and Li, Qitong and Woods, Eric V and Tian, Mengkun and Eftekhar, Ali A and Lyu, Yuanqi and Zhang, Xiang and Ajayan, Pulickel M and Cai, Wenshan and Brongersma, Mark L and Analytis, James G and Adibi, Ali}, year = {2025}, doi = {10.1021/acs.nanolett.5c02040}, url = {https://www.osti.gov/biblio/2573994}, note = {Source identifier: 2573994} }