@misc{indiciaeafeb2e876ade,
  title = {Where Atomically Precise Catalysts, Optoelectronic Devices, and Quantum Information Technology Intersect: Atomic Layer Deposition},
  author = {Solanki, Devan (ORCID:0000000314308295) and He, Chengxing and Lim, Yoonseo (ORCID:0009000299364930) and Yanagi, Rito and Hu, Shu (ORCID:0000000250410169)},
  year = {2024},
  doi = {10.1021/acs.chemmater.3c00589},
  url = {https://www.osti.gov/biblio/2577250},
  note = {Source identifier: 2577250}
}