TY  - RPRT
TI  - Where Atomically Precise Catalysts, Optoelectronic Devices, and Quantum Information Technology Intersect: Atomic Layer Deposition
AU  - Solanki, Devan (ORCID:0000000314308295)
AU  - He, Chengxing
AU  - Lim, Yoonseo (ORCID:0009000299364930)
AU  - Yanagi, Rito
AU  - Hu, Shu (ORCID:0000000250410169)
PY  - 2024
DO  - 10.1021/acs.chemmater.3c00589
UR  - https://www.osti.gov/biblio/2577250
ID  - 2577250
ER  -