@misc{indiciaee43e6b21c89a,
  title = {Using scalable computer vision to automate high-throughput semiconductor characterization},
  author = {Siemenn, Alexander (ORCID:0000000188417887) and Aissi, Eunice (ORCID:0000000347015202) and Sheng, Fang and Tiihonen, Armi and Kavak, Hamide (ORCID:0000000298102640) and Das, Basita and Buonassisi, Tonio},
  year = {2024},
  doi = {10.1038/s41467-024-48768-2},
  url = {https://www.osti.gov/biblio/2578011},
  note = {Source identifier: 2578011}
}