TY  - RPRT
TI  - Using scalable computer vision to automate high-throughput semiconductor characterization
AU  - Siemenn, Alexander (ORCID:0000000188417887)
AU  - Aissi, Eunice (ORCID:0000000347015202)
AU  - Sheng, Fang
AU  - Tiihonen, Armi
AU  - Kavak, Hamide (ORCID:0000000298102640)
AU  - Das, Basita
AU  - Buonassisi, Tonio
PY  - 2024
DO  - 10.1038/s41467-024-48768-2
UR  - https://www.osti.gov/biblio/2578011
ID  - 2578011
ER  -