@misc{indiciae4dc9bcc86e21, title = {Physical vapor deposition simulator by graphical processor unit ray casting}, author = {Thomas, Adam (ORCID:0009000416870833) and Kotadiya, Naresh and Wang, Binyu (ORCID:0009000573585040) and Dhakal, Tara (ORCID:0000000308853254)}, year = {2023}, doi = {10.1116/6.0003045}, url = {https://www.osti.gov/biblio/2579961}, note = {Source identifier: 2579961} }