TY  - RPRT
TI  - Physical vapor deposition simulator by graphical processor unit ray casting
AU  - Thomas, Adam (ORCID:0009000416870833)
AU  - Kotadiya, Naresh
AU  - Wang, Binyu (ORCID:0009000573585040)
AU  - Dhakal, Tara (ORCID:0000000308853254)
PY  - 2023
DO  - 10.1116/6.0003045
UR  - https://www.osti.gov/biblio/2579961
ID  - 2579961
ER  -