@misc{indiciaefb7981808d1a,
  title = {Enhanced nucleation mechanism in ruthenium atomic layer deposition: Exploring surface termination and precursor ligand effects with RuCpEt(CO)2},
  author = {Rothman, Amnon (ORCID:0000000270958279) and Seo, Seunggi (ORCID:0000000215592286) and Woodruff, Jacob and Kim, Hyungjun (ORCID:0000000153932053) and Bent, Stacey (ORCID:0000000210845336)},
  year = {2024},
  doi = {10.1116/6.0003775},
  url = {https://www.osti.gov/biblio/2579967},
  note = {Source identifier: 2579967}
}