TY  - RPRT
TI  - Enhanced nucleation mechanism in ruthenium atomic layer deposition: Exploring surface termination and precursor ligand effects with RuCpEt(CO)2
AU  - Rothman, Amnon (ORCID:0000000270958279)
AU  - Seo, Seunggi (ORCID:0000000215592286)
AU  - Woodruff, Jacob
AU  - Kim, Hyungjun (ORCID:0000000153932053)
AU  - Bent, Stacey (ORCID:0000000210845336)
PY  - 2024
DO  - 10.1116/6.0003775
UR  - https://www.osti.gov/biblio/2579967
ID  - 2579967
ER  -