@misc{indiciaecfc1009bab9b,
  title = {Abnormal Silicon Etching Behaviors in Nanometer-Sized Channels},
  author = {Koo, Kunmo and Chang, Joon (ORCID:0000000188779917) and Ji, Sanghyeon and Choi, Hyuk (ORCID:0000000278992631) and Cho, Seunghee and Yoo, Seung and Choe, Jacob and Lee, Hyo and Bae, Sang and Oh, Jung and Woo, Hee and Shin, Seungmin and Lee, Kuntack and Kim, Tae-Hong and Jung, Yeon (ORCID:0000000277098347) and Kwon, Ji-Hwan and Lee, Ju and Huh, Yoon and Kang, Sung and Kim, Hyun (ORCID:0000000181051640) and Yuk, Jong (ORCID:0000000246777363)},
  year = {2024},
  doi = {10.1021/acs.nanolett.4c00326},
  url = {https://www.osti.gov/biblio/2581588},
  note = {Source identifier: 2581588}
}