@misc{indiciae23b544b787b3,
  title = {Characterization of superconducting through-silicon vias as capacitive elements in quantum circuits},
  author = {Hazard, T. (ORCID:0000000215429286) and Woods, W. and Rosenberg, D. (ORCID:000900099475202X) and Das, R. (ORCID:0009000206357230) and Hirjibehedin, C. (ORCID:0000000317062147) and Kim, D. (ORCID:0009000100107823) and Knecht, J. and Mallek, J. and Melville, A. (ORCID:0000000311589036) and Niedzielski, B. (ORCID:0000000282778064) and Serniak, K. (ORCID:0000000334699166) and Sliwa, K. and Yost, D. (ORCID:0000000312643241) and Yoder, J. and Oliver, W. (ORCID:0000000180410824) and Schwartz, M. (ORCID:0000000344068974)},
  year = {2023},
  doi = {10.1063/5.0170055},
  url = {https://www.osti.gov/biblio/2582108},
  note = {Source identifier: 2582108}
}