@misc{indiciae02468f9dbe8e,
  title = {Effect of pattern transfer process on roughness of block copolymer patterns from directed self-assembly},
  author = {Loo, Whitney and Chang, Boyce and Yu, Beihang and Dhuey, Scott and Nealey, Paul and Ruiz, Ricardo},
  year = {2025},
  doi = {10.1117/1.jmm.24.1.013002},
  url = {https://www.osti.gov/biblio/2584228},
  note = {Source identifier: 2584228}
}