TY  - RPRT
TI  - Effect of pattern transfer process on roughness of block copolymer patterns from directed self-assembly
AU  - Loo, Whitney
AU  - Chang, Boyce
AU  - Yu, Beihang
AU  - Dhuey, Scott
AU  - Nealey, Paul
AU  - Ruiz, Ricardo
PY  - 2025
DO  - 10.1117/1.jmm.24.1.013002
UR  - https://www.osti.gov/biblio/2584228
ID  - 2584228
ER  -