@misc{indiciaec090c91a5aab, title = {Characterizing a Precise Ground Truth Mirror for CSP Optical Metrology}, author = {Phelps, Nicholas Clifton and Brost, Randolph}, year = {2024}, doi = {10.2172/2585716}, url = {https://www.osti.gov/biblio/2585716}, note = {Source identifier: 2585716} }