@misc{indiciaed6b9241782e6,
  title = {Pathfinding Process Development for the Realization of Atomic Precision Advanced Manufacturing (APAM)-Based Vertical Tunneling Field Effect Transistors for Enhanced Energy Efficiency},
  author = {Anderson, Evan Michael and Allemang, Christopher Richard and Arose, Christopher Dylan Jon and Lu, Tzu-Ming and Schmucker, Scott William and Sheridan, Thomas Robert and Ivie, Jeffrey Andrew and Campbell, DeAnna Marie and Vigil, Ashlyn Pamela Rose and Hawkins, Alisha and Gamache, Phillip and Gao, Xujiao and Weingartner, Thomas Alan and Misra, Shashank},
  year = {2024},
  doi = {10.2172/2586375},
  url = {https://www.osti.gov/biblio/2586375},
  note = {Source identifier: 2586375}
}