TY  - RPRT
TI  - Pathfinding Process Development for the Realization of Atomic Precision Advanced Manufacturing (APAM)-Based Vertical Tunneling Field Effect Transistors for Enhanced Energy Efficiency
AU  - Anderson, Evan Michael
AU  - Allemang, Christopher Richard
AU  - Arose, Christopher Dylan Jon
AU  - Lu, Tzu-Ming
AU  - Schmucker, Scott William
AU  - Sheridan, Thomas Robert
AU  - Ivie, Jeffrey Andrew
AU  - Campbell, DeAnna Marie
AU  - Vigil, Ashlyn Pamela Rose
AU  - Hawkins, Alisha
AU  - Gamache, Phillip
AU  - Gao, Xujiao
AU  - Weingartner, Thomas Alan
AU  - Misra, Shashank
PY  - 2024
DO  - 10.2172/2586375
UR  - https://www.osti.gov/biblio/2586375
ID  - 2586375
ER  -