TY - RPRT TI - Single Metal Atom Catalysts Prepared by Diluted Atomic Layer Deposition AU - Shen, Kai [Univ. of Pennsylvania, Philadelphia, PA (United States)] AU - Fan, Mengjie [Univ. of Pennsylvania, Philadelphia, PA (United States)] AU - Liu, Zhanyuan [Univ. of Pennsylvania, Philadelphia, PA (United States)] AU - Satyanand, Sakshi [Univ. of Pennsylvania, Philadelphia, PA (United States); Univ. of Delaware, Newark, DE (United States)] AU - Yan, George [Univ. of Delaware, Newark, DE (United States)] (ORCID:0009000238705447) AU - Yu, Hung-Ling [Virginia Polytechnic Inst. and State Univ. (Virginia Tech), Blacksburg, VA (United States)] AU - Eisa, Mohamed [Virginia Polytechnic Inst. and State Univ. (Virginia Tech), Blacksburg, VA (United States)] AU - Caratzoulas, Stavros [Univ. of Delaware, Newark, DE (United States)] (ORCID:0000000195994199) AU - Stavitski, Eli [Brookhaven National Laboratory (BNL), Upton, NY (United States). National Synchrotron Light Source II (NSLS-II)] (ORCID:0000000233372930) AU - Karim, Ayman M. [Virginia Polytechnic Inst. and State Univ. (Virginia Tech), Blacksburg, VA (United States)] (ORCID:000000017449542X) AU - Vlachos, Dionisios G. [Univ. of Delaware, Newark, DE (United States)] (ORCID:0000000267958403) AU - Gorte, Raymond J. [Univ. of Pennsylvania, Philadelphia, PA (United States)] (ORCID:000000030879715X) AU - Vohs, John M. [Univ. of Pennsylvania, Philadelphia, PA (United States)] (ORCID:0000000282835241) PY - 2025 DO - 10.1021/acsami.5c10576 UR - https://www.osti.gov/biblio/2587796 ID - 2587796 ER -