TY  - RPRT
TI  - CFD Simulation of the Dosing Behavior within the Atomic Layer Deposition Feeding System
AU  - Yuan, Yuchen [East China Univ. of Science and Technology, Shanghai (China)]
AU  - Ping, Huihui [East China Univ. of Science and Technology, Shanghai (China)]
AU  - Lee, Dennis T. [Johns Hopkins Univ., Baltimore, MD (United States)] (ORCID:0000000219762852)
AU  - Corkery, Peter [Johns Hopkins Univ., Baltimore, MD (United States)]
AU  - Zhang, Zhen [East China Univ. of Science and Technology, Shanghai (China)] (ORCID:000000034184654X)
AU  - Liu, Cui [East China Univ. of Science and Technology, Shanghai (China)]
AU  - Xue, Shuang-mei [Shenzhen Univ. (China)]
AU  - Zhuang, Liwei [East China Univ. of Science and Technology, Shanghai (China)] (ORCID:0000000232611872)
AU  - Tsapatsis, Michael [Johns Hopkins Univ., Baltimore, MD (United States)] (ORCID:0000000156103525)
PY  - 2023
DO  - 10.1021/acs.iecr.3c01151
UR  - https://www.osti.gov/biblio/2978639
ID  - 2978639
ER  -