@misc{indiciaee4c58d68449c,
  title = {Challenges and Solutions to Failure Analysis in 3D Microsystems},
  author = {Cole, Edward I.},
  year = {2024},
  doi = {10.2172/2999492},
  url = {https://www.osti.gov/biblio/2999492},
  note = {Source identifier: 2999492}
}