@misc{indiciae91c94508a95c,
  title = {Nanofabrication techniques of Josephson junction for transmon qubit},
  author = {Bonaccorsi, Tommaso},
  year = {2022},
  doi = {10.2172/3000308},
  url = {https://www.osti.gov/biblio/3000308},
  note = {Source identifier: 3000308}
}