TY  - RPRT
TI  - Deposit and Evaluate Material Across Extremes of Process Windows
AU  - Nandwana, Peeyush [Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)] (ORCID:0000000251471668)
AU  - Dryepondt, Sebastien [Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)] (ORCID:0000000312651612)
AU  - Massey, Caleb [Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)]
AU  - Bell, Sam [Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)] (ORCID:0000000251905657)
AU  - Nayir, Selda [Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)] (ORCID:0000000324578467)
AU  - Kumari, Geeta [Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)] (ORCID:0000000230561621)
AU  - Joslin, Chase [Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)] (ORCID:0000000246246511)
PY  - 2025
DO  - 10.2172/3002565
UR  - https://www.osti.gov/biblio/3002565
ID  - 3002565
ER  -