@misc{indiciae0f9ce6571fad,
  title = {Supporting Data for "Pitfalls in Parameters: Practical Process Development in Chemical Vapor Processing of SiC"},
  author = {Lamm, Benjamin W [Oak Ridge National Laboratory] (ORCID:0000000340417786) and Ramirez, Valencia [Oak Ridge National Laboratory] (ORCID:0009000502222824) and Rogers, Alex [Oak Ridge National Laboratory] (ORCID:0000000177046873) and Koyanagi, Takaaki [Oak Ridge National Laboratory] (ORCID:0000000172724049)},
  year = {2026},
  doi = {10.13139/ornlnccs/3007123},
  url = {https://www.osti.gov/biblio/3007123},
  note = {Source identifier: 3007123}
}