TY  - RPRT
TI  - Supporting Data for "Pitfalls in Parameters: Practical Process Development in Chemical Vapor Processing of SiC"
AU  - Lamm, Benjamin W [Oak Ridge National Laboratory] (ORCID:0000000340417786)
AU  - Ramirez, Valencia [Oak Ridge National Laboratory] (ORCID:0009000502222824)
AU  - Rogers, Alex [Oak Ridge National Laboratory] (ORCID:0000000177046873)
AU  - Koyanagi, Takaaki [Oak Ridge National Laboratory] (ORCID:0000000172724049)
PY  - 2026
DO  - 10.13139/ornlnccs/3007123
UR  - https://www.osti.gov/biblio/3007123
ID  - 3007123
ER  -