@misc{indiciae8ae2a5ce9f96, title = {Studies as a function of different ALD capping layers on cavity losses for QIS and accelerators}, author = {Grassellino, L. [Fermilab] and Crisa, F. [Fermilab] and Kalboussi, Y. [Fermilab] and Proslier, T. [Fermilab] and Murthy, A. [Fermilab] and Bafia, D. [Fermilab] and Posen, S. [Fermilab] and Belomestnykh, S. [Fermilab] and Romanenko, A. [Fermilab] and Grassellino, A. [Fermilab]}, year = {2025}, doi = {10.2172/3018481}, url = {https://www.osti.gov/biblio/3018481}, note = {Source identifier: 3018481} }