@misc{indiciaed94a1c7a7f8b,
  title = {Sample characterization for Plasma Processing},
  author = {Palucci, Andrea [Fermilab]},
  year = {2025},
  doi = {10.2172/3018564},
  url = {https://www.osti.gov/biblio/3018564},
  note = {Source identifier: 3018564}
}