@misc{indiciae9ef46b5a65bb,
  title = {Determining Stress in Metallic Conducting Layers of Microelectronics Devices Using High Resolution Electron Backscatter Diffraction and Finite Element Analysis},
  author = {Ruggles, Timothy and Grutzik, Scott Joseph and Stephens, Kelly Suzanne and Michael, Joseph R.},
  year = {2023},
  doi = {10.1093/micmic/ozad013},
  url = {https://www.osti.gov/biblio/3019222},
  note = {Source identifier: 3019222}
}