@misc{indiciae7c1e5113132a,
  title = {Sapphire Substrate Trenching to Advance Superconducting High-Coherence Quantum Devices},
  author = {Garattoni, S. [Fermilab] and Bal, M. [Fermilab] and Crisa, F. [Fermilab] and Murthy, A. [Fermilab] and Lee, J. Y. [Fermilab] and Clairmont, A. [Fermilab] and Sung, Z. [Fermilab] and Nekrashevich, I. [Fermilab] and Panthee, J. [Fermilab; Northwestern U.] and Zhu, S. [Fermilab] and Romanenko, A. [Fermilab] and Grassellino, A. [Fermilab]},
  year = {2026},
  doi = {10.2172/3025849},
  url = {https://www.osti.gov/biblio/3025849},
  note = {Source identifier: 3025849}
}