@misc{indiciae350ef7498251, title = {Thermal Metrology and Subsurface Evaluation of Heterogeneously Integrated Microelectronics}, author = {Jarzembski, Amun [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] and Yates, Luke [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] (ORCID:0000000150528944) and Neely, Jason Christopher [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] (ORCID:0000000287573228) and Piontkowski, Zachary Tyler [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] (ORCID:0000000262820106) and Bahr, Matthew Nathaniel [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] (ORCID:0009000759593938) and Jordan, Matthew [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] (ORCID:0000000345262664) and Jauregui, Luis Jose [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] (ORCID:0000000308978444) and Lu, Ping [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] (ORCID:0000000293697462) and Hodges, Wyatt Lea [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] (ORCID:0000000303868908) and Nair, Siddharth [Purdue University] and Semperlotti, Fabio [Purdue University]}, year = {2025}, doi = {10.2172/3027408}, url = {https://www.osti.gov/biblio/3027408}, note = {Source identifier: 3027408} }