TY - RPRT TI - Thermal Metrology and Subsurface Evaluation of Heterogeneously Integrated Microelectronics AU - Jarzembski, Amun [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] AU - Yates, Luke [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] (ORCID:0000000150528944) AU - Neely, Jason Christopher [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] (ORCID:0000000287573228) AU - Piontkowski, Zachary Tyler [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] (ORCID:0000000262820106) AU - Bahr, Matthew Nathaniel [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] (ORCID:0009000759593938) AU - Jordan, Matthew [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] (ORCID:0000000345262664) AU - Jauregui, Luis Jose [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] (ORCID:0000000308978444) AU - Lu, Ping [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] (ORCID:0000000293697462) AU - Hodges, Wyatt Lea [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] (ORCID:0000000303868908) AU - Nair, Siddharth [Purdue University] AU - Semperlotti, Fabio [Purdue University] PY - 2025 DO - 10.2172/3027408 UR - https://www.osti.gov/biblio/3027408 ID - 3027408 ER -