@misc{indiciaef999c898c984,
  title = {Plasma-assisted atomic layer etching of single-crystal diamond},
  author = {Draney, J. S. [Princeton University, NJ (United States)] (ORCID:0000000202892554) and Panagiotopoulos, A. Z. [Princeton University, NJ (United States)] (ORCID:0000000281526615) and Graves, D. B. [Princeton University, NJ (United States)] (ORCID:0000000222886768)},
  year = {2026},
  doi = {10.1116/6.0005266},
  url = {https://www.osti.gov/biblio/3029220},
  note = {Source identifier: 3029220}
}