TY  - RPRT
TI  - Plasma-assisted atomic layer etching of single-crystal diamond
AU  - Draney, J. S. [Princeton University, NJ (United States)] (ORCID:0000000202892554)
AU  - Panagiotopoulos, A. Z. [Princeton University, NJ (United States)] (ORCID:0000000281526615)
AU  - Graves, D. B. [Princeton University, NJ (United States)] (ORCID:0000000222886768)
PY  - 2026
DO  - 10.1116/6.0005266
UR  - https://www.osti.gov/biblio/3029220
ID  - 3029220
ER  -