@misc{indiciae981f90d22b47, title = {Harmonic suppression gratings for soft X-ray monochromators}, author = {Goldberg, Kenneth A. [Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)] (ORCID:0000000199845780) and Barnard, Harold S. [Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)] (ORCID:0000000169327173) and Park, Sooyeon [Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)] (ORCID:0000000182946681) and Gullikson, Eric M. [Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)] (ORCID:0000000303377674) and Voronov, Dmitriy L. [Lawrence Berkeley National Laboratory (LBNL), Berkeley, CA (United States)] (ORCID:0000000281458819)}, year = {2026}, doi = {10.1364/ol.587366}, url = {https://www.osti.gov/biblio/3030668}, note = {Source identifier: 3030668} }