@misc{indiciae7a2f7a54b39b,
  title = {High aspect ratio structures enabled by backside illumination of SU-8},
  author = {Burckel, David Bruce [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] (ORCID:000000032222047X) and Reyna, Robert [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] (ORCID:0009000562995829) and Risley, Mason James [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] (ORCID:0009000052387057) and Creason, Tielyr Dayne [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] and Gee, Gavin Christopher [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)]},
  year = {2025},
  doi = {10.2172/3365835},
  url = {https://www.osti.gov/biblio/3365835},
  note = {Source identifier: 3365835}
}