TY  - RPRT
TI  - High aspect ratio structures enabled by backside illumination of SU-8
AU  - Burckel, David Bruce [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] (ORCID:000000032222047X)
AU  - Reyna, Robert [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] (ORCID:0009000562995829)
AU  - Risley, Mason James [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] (ORCID:0009000052387057)
AU  - Creason, Tielyr Dayne [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)]
AU  - Gee, Gavin Christopher [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)]
PY  - 2025
DO  - 10.2172/3365835
UR  - https://www.osti.gov/biblio/3365835
ID  - 3365835
ER  -