TY - RPRT TI - Pyrolyzed Carbon as a True Grayscale Mask AU - Burckel, David Bruce [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] (ORCID:000000032222047X) AU - Creason, Tielyr Dayne [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] AU - Kaehr, Bryan James [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] (ORCID:0000000292277060) PY - 2025 DO - 10.2172/3365837 UR - https://www.osti.gov/biblio/3365837 ID - 3365837 ER -