@misc{indiciaedf65b9bddbb1, title = {Autonomous fabrication of tailored defect structures in 2D materials using machine learning-enabled scanning transmission electron microscopy}, author = {Wu, Zijie [Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)] and Roccapriore, Kevin M. [Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States); AtomQ, Knoxville, TN (United States)] and Ghosh, Ayana [Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)] and Xiao, Kai [Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)] and Unocic, Raymond R. [North Carolina State University, Raleigh, NC (United States)] and Jesse, Stephen [Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)] and Vasudevan, Rama K. [Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)] and Boebinger, Matthew G. [Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States)] (ORCID:0000000196222043)}, year = {2026}, doi = {10.1038/s41524-026-02025-w}, url = {https://www.osti.gov/biblio/3367068}, note = {Source identifier: 3367068} }