@misc{indiciaecec7ed42749e,
  title = {Silicon Fin Capacitor for Superconducting Quantum Circuits},
  author = {Finnegan, Patrick Sean [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] (ORCID:0000000241166379) and Skinner Ramos, Sueli Del Carmen [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] (ORCID:0009000102592084) and Reyna, Robert [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] (ORCID:0009000562995829) and Weatherred, Scott Edward [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] (ORCID:0009000091734496) and Carr, Stephen M [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] (ORCID:0009000962352072)},
  year = {2025},
  doi = {10.2172/3369064},
  url = {https://www.osti.gov/biblio/3369064},
  note = {Source identifier: 3369064}
}