TY  - RPRT
TI  - Silicon Fin Capacitor for Superconducting Quantum Circuits
AU  - Finnegan, Patrick Sean [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] (ORCID:0000000241166379)
AU  - Skinner Ramos, Sueli Del Carmen [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] (ORCID:0009000102592084)
AU  - Reyna, Robert [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] (ORCID:0009000562995829)
AU  - Weatherred, Scott Edward [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] (ORCID:0009000091734496)
AU  - Carr, Stephen M [Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)] (ORCID:0009000962352072)
PY  - 2025
DO  - 10.2172/3369064
UR  - https://www.osti.gov/biblio/3369064
ID  - 3369064
ER  -