@misc{indiciae878eb20f3d7e,
  title = {Site-specific surface reactivity on MgO for atomic layer deposition via selective hydration},
  author = {Yan, Chang [Argonne National Laboratory (ANL), Lemont, IL (United States)] (ORCID:0000000247061236) and Xu, Jiayi [Argonne National Laboratory (ANL), Lemont, IL (United States)] (ORCID:0000000317636251) and Muir, Mark [Argonne National Laboratory (ANL), Lemont, IL (United States)] (ORCID:0000000318900579) and Dua, Asare [Illinois Institute of Technology, Chicago, IL (United States)] (ORCID:0000000244303674) and Hock, Adam [Illinois Institute of Technology, Chicago, IL (United States)] and Martinson, Alex B.F. [Argonne National Laboratory (ANL), Lemont, IL (United States)] (ORCID:0000000339161672) and Liu, Cong [Argonne National Laboratory (ANL), Lemont, IL (United States)] (ORCID:0000000221455034)},
  year = {2025},
  doi = {10.1016/j.apsusc.2025.165698},
  url = {https://www.osti.gov/biblio/3372185},
  note = {Source identifier: 3372185}
}